一、課程簡介:
Introduction to Semiconductor Processes and Quality Engineering
IC Fabrication
Oxidation
CVD
Lithography
Etching
Diffusion
Ion Implantation
PVD
CMOS Fabrication
Evolution of Quality Control
History of quality engineering
Total quality system

Review of Statistics
The Probabilistic Nature of Almost Everything
Random Variables
Frequency Distribution
Purpose and Nature of Sampling
Measurement of Central Tendency
Measurement of Dispersion
Probability Distribution
Central Limit Theorem
Useful Graphical Representations of Data
Statistical Inference
On-line Semiconductor Process Monitoring
Conceptual Framework
Construction of Shewhart Control Charts
Interpretation of Shewhart Control Charts
Importance of Rational Grouping and Sampling
Control Charts for Individual Measurements
Cumulative-Sum and EWMA Control Charts
Process Capability Assessment
Shewhart Control Charts for Attribute Data
Statistical Process Control and Automatic Process Control
Acceptance Sampling
Off-line Semiconductor Process Optimization
Conceptual Framework for Robust Design
Planned Experimentation using Orthogonal Arrays
Steps in Robust Design
Taguchi‘s Approach to Robust Design
Case Study: Polysilicon Deposition Process
Design of Factorial Experiments
Analysis of Factorial Experiments
Two-Level Fractional Factorial Designs
Analysis of Fractional Factorial Experiments
Sequential and Iterative Nature of Experimentation


二、先修課程:

三、參考書目: